@misc{777111,
  author = {E. Walters},
  title = {NIST List of Publications LP 103, National Semiconductor Metrology Program and Semiconductor Electronics Division},
  year = {1999},
  month = {1999-04-21 00:04:00},
  publisher = {Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}