@conference{777376, author = {S. Mechels and M. Young}, title = {Scanning Confocal Microscope for Accurate Dimensional Measurement}, year = {1992}, number = {1660}, month = {1992-01-01 00:01:00}, publisher = {Proc., SPIE, Biomedical Image Processing and Three-Dimensional Microscopy, Undefined}, language = {en}, }