@misc{777541,
  author = {Barbara Belzer and James Ehrstein},
  title = {Conference Report: NIST Workshop on Thin Dielectric Film Metrology},
  year = {1998},
  number = {103},
  month = {1998-08-01 00:08:00},
  publisher = {Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}