@conference{777701,
  author = {Eric Vogel and J. Wortman},
  title = {Properties of N- and P-Channel MOSFETs with Ultrathin RTCVD Oxynitride Gate Dielectrics},
  year = {1999},
  month = {1999-10-01 00:10:00},
  publisher = {Extended Abstracts of the Electrochemical Society, Seattle, WA, USA},
  language = {en},
}