@conference{777766,
  author = {H. Huff and Curt Richter and M. Green and G. Lucovsky},
  title = {Preface to Materials Research Society 1999 Proceedings},
  year = {1999},
  month = {1999-04-05 00:04:00},
  publisher = {1999 Materials Research Society Symposium proceedings, Ultrathin SiO^d2^ and High-K Materials for Gate Dielectrics, San Francisco, CA, USA},
  language = {en},
}