@conference{777806,
  author = {Marla Dowell and Richard Jones and Holger Laabs and Christopher Cromer},
  title = {New Developments in Excimer Laser Metrology at 157 and 193 nm},
  year = {2002},
  month = {2002-04-11 00:04:00},
  publisher = {Proc., Intl. Symp. on 157 nm Laser Measurements, Ft. Lauderdale, FL, USA},
  language = {en},
}