@article{777981,
  author = {Loucas Christophorou and James Olthoff},
  title = {Electron Interactions with Plasma Processing Gases: Present Status and Future Needs},
  year = {2002},
  month = {2002-09-09 00:09:00},
  publisher = {Elsevier Science B.V.},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=30830},
  language = {en},
}