@conference{778176,
  author = {Eric Vogel and George Brown},
  title = {Challenges of Electrical Measurements of Advanced Gate Dielectrics in Metal-Oxide-Semiconductor Devices},
  year = {2003},
  month = {2003-09-30 00:09:00},
  publisher = {Characterization and Metrology for ULSI Technology: 2003, Austin, TX, USA},
  language = {en},
}