@misc{778801, author = {Stephen Knight and A Settle-Raskin}, title = {National Semiconductor Metrology Program, Project Portfolio, FY 1998}, year = {1998}, month = {1998-03-01 00:03:00}, publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD}, language = {en}, }