@misc{779096,
  author = {Barbara Belzer and David Blackburn},
  title = {Semiconductor Measurement Technology: The Results of an Interlaboratory Study of Ellipsometric Measurements of Thin Film Silicon Dioxide on Silicon},
  year = {1997},
  month = {1997-05-01 00:05:00},
  publisher = {Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}