@conference{779101,
  author = {D. Nyyssonen},
  title = {A New Approach to Image Modeling and Edge Detection in the SEM},
  year = {1988},
  number = {921},
  month = {1988-12-31 00:12:00},
  publisher = {Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control II, Santa Clara, CA, USA},
  language = {en},
}