@article{779366,
  author = {Michael Postek and D. Joy},
  title = {Microelectronics Dimensional Metrology in the Scanning Electron Microscope, Part II},
  year = {1986},
  number = {12},
  month = {1986-12-31 00:12:00},
  publisher = {Solid State Technology},
  language = {en},
}