@conference{779546,
  author = {David Simons and P Chi and R. Downing and James Ehrstein and J. Knudsen},
  title = {Progress Toward a Semiconductor Depth-Profiling Standard},
  year = {1988},
  month = {1988-12-31 00:12:00},
  publisher = {Proc., SIMS-VI, Secondary Ion Mass Spectrometry Conference, Versailles, 1, FR},
  language = {en},
}