@misc{781106,
  author = {Loucas Christophorou and James Olthoff},
  title = {Electron Interactions with Plasma Processing Gases: An Update for CF<sub>4</sub>, CHF<sub>3</sub>, C<sub>2</sub>F<sub>6</sub> and C<sub>3</sub>F<sub>8</sub>},
  year = {1999},
  number = {28},
  month = {1999-12-01 00:12:00},
  publisher = {J. Phys. & Chem. Ref. Data (JPCRD), National Institute of Standards and Technology, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=2666},
  language = {en},
}