@conference{782141,
  author = {Curt Richter and Nhan Nguyen and G Alers},
  title = {Spectroscopic Ellipsometry of Ta<sub>2</sub>0<sub>5</sub> On Si, in Ultrathin SiO<sub>2</sub> and High-K Materials for ULSI Gate Dielectrics, edited by H. R. Huff, C. A. Richter, M. L. Green, G. Lucovsky, and T. Hattori},
  year = {1999},
  month = {1999-09-01 00:09:00},
  publisher = {Proc., Mater. Res. Soc. Symp. , Pittsburgh, PA, USA},
  language = {en},
}