@article{783086,
  author = {Eric Lin and V. Lee and G Lynn and Wen-Li Wu and M O'Neill},
  title = {Structural Characterization of a Porous Low Dielectric Constant Thin Film With a Non Uniform Depth Profile},
  year = {2002},
  number = {81},
  month = {2002-07-01 00:07:00},
  publisher = {Applied Physics Letters},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851997},
  language = {en},
}