@conference{783131,
  author = {Joseph~undefined~undefined~undefined~undefined~undefined Lenhart and Ronald Jones and Eric Lin and Christopher Soles and Wen-Li Wu and Daniel Fischer and S Sambasivan and D Goldfarb and M Angelopoulos},
  title = {Probing Surface and Bulk Chemistry in Resist Films Using Near Edge X-Ray Absorption Fine Structure},
  year = {2002},
  number = {20},
  month = {2002-05-01 00:05:00},
  publisher = {Electron, Ion, and Photon Beam Technology and Nanofabrication, International Conference | 46th | | AVS, Undefined},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852004},
  language = {en},
}