@article{783756,
  author = {Denis Tsvetkov and Y Melnik and Albert Davydov and Alexander Shapiro and O Kovalenkov and J Lam and J Song},
  title = {Growth of Submicron AlGaN/GaN/AlGaN Heterostructures by Hydride Vapor Phase Epitaxy (HVPE)},
  year = {2001},
  number = {188},
  month = {2001-11-01 00:11:00},
  publisher = {Physica Status Solidi A-Applications and Materials Science},
  language = {en},
}