@conference{783831,
  author = {M Baklanov and E Kondoh and Eric Lin and D Gidley and V. Lee and K Mogilnikov and J Sun},
  title = {Comparative Study of Porous SOG Films with Different Non-Destructive Instrumentation},
  year = {2001},
  month = {2001-01-01 00:01:00},
  publisher = {Proc. of the Intl. Interconnect Technology Conf, Undefined},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853742},
  language = {en},
}