@conference{784016,
  author = {J Sanabia and S Goldie and L Ratliff and Lori Goldner and John Gillaspy},
  title = {Highly Charged Ion Bombardment of Silicon Surfaces},
  year = {2003},
  number = {680},
  month = {2003-08-01 00:08:00},
  publisher = {International Conference on the Application of Accelerators in Research and Industry|17th|Application of Accelerators in Research and Industry: Seventeenth International Conference on the Application of Accelerators in Research and Industry, Undefined},
  language = {en},
}