@article{784791,
  author = {B Dragnea and J Preusser and S Szarko and S Leone and W Hinsberg},
  title = {Pattern Characterization of Deep-Ultraviolet Photoresists by Near-Field Infrared Microscopy},
  year = {2001},
  number = {19},
  month = {2001-02-01 00:02:00},
  publisher = {Journal of Vacuum Science and Technology B},
  language = {en},
}