@article{786016,
  author = {B Dragnea and Jan Preusser and J Szarko and S Leone and W Hinsberg},
  title = {Pattern characterization of deep-ultraviolet photoresists by near-field infrared microscopy},
  year = {2001},
  number = {19},
  month = {2001-01-01 00:01:00},
  publisher = {Journal of Vacuum Science and Technology B},
  language = {en},
}