@article{794176,
author = {Nhan Nguyen and Curt Richter and Yong Cho and G Alers and L. Stirling},
title = {Effects of High Temperature Annealing on the Dielectric Function of Ta2O5 Films Observed by Spectroscopic Ellipsometry},
year = {2000},
number = {77},
month = {2000-11-06 00:11:00},
publisher = {Applied Physics Letters},
language = {en},
}