@article{795731, author = {John Suehle and Baozhong Zhu and Yuan Chen and J Bernstein}, title = {Detailed Study and Projection of Hard Breakdown Evolution in Ultra-Thin Gate Oxides}, year = {2005}, number = {45}, month = {2005-02-28 00:02:00}, publisher = {Microelectronics Reliability}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31833}, language = {en}, }