@article{799971,
  author = {N Materer and R Goodman and S Leone},
  title = {Comparison of electron cyclotron resonance and radio-frequency inductively coupled plasmas of Ar and N<sub>2</sub>: Neutral kinetic energies and source gas cracking},
  year = {1998},
  number = {83},
  month = {1998-01-01 00:01:00},
  publisher = {Journal of Applied Physics},
  language = {en},
}