@article{800006,
  author = {S Hill and C Haich and F Dunning and G Walters and Jabez McClelland and Robert Celotta and H Craighead},
  title = {Patterning of Hydrogen-Passivated Si(100) using Ar(<sup>3</sup>P<sub>0,2</sub>) Metastable Atoms},
  year = {1999},
  number = {74},
  month = {1999-04-12 00:04:00},
  publisher = {Applied Physics Letters},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620510},
  language = {en},
}