@article{803636,
  author = {V. Lee and C Chao and Eric Lin and Wen-Li Wu and B Fanconi and J Lan and Y Cheng and H Liou and Y Wang and M Feng},
  title = {X-Ray Reflectivity and FTIR Measurements of N2 Plasma Effects on the Density Profile of Hydrogen Silsesquioxane Thin Films},
  year = {2001},
  number = {148},
  month = {2001-10-01 00:10:00},
  publisher = {Journal of the Electrochemical Society},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851795},
  language = {en},
}