@article{803876,
  author = {E Kondoh and M Baklanov and Eric Lin and D Gidley and A Nakashima},
  title = {Comparative Study of Pore Size of Low-Dielectric-Contant Porous Spin-on-Glass Films with Different Ways of Non-destructive Instrumentation},
  year = {2001},
  number = { 40},
  month = {2001-01-01 00:01:00},
  publisher = {Japanese Journal of Applied Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853771},
  language = {en},
}