@conference{806836,
  author = {M Hartman and Paul Rice and Dudley Finch and G. Skidmore and Victor Bright},
  title = {Force-deflection characterization of individual carbon nanotubes attached to MEMS devices},
  year = {2004},
  month = {2004-01-25 00:01:00},
  publisher = {MEMS Tech. Dig., Maastricht, NL},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=50038},
  doi = {https://doi.org/10.1109/MEMS.2004.1290613},
  language = {en},
}