@article{807806,
  author = {Chang Lee and John Bonevich and Thomas Moffat},
  title = {Magnetic Materials for 3-D Damascene Metallization: Void-free Electrodeposition of Ni and Ni_(subscript 70)Fe_(subscript 30) Using 2-Mercapto-5-benzimidazolesulfonic Acid},
  year = {2008},
  number = {155},
  month = {2008-07-01 00:07:00},
  publisher = {Journal of the Electrochemical Society},
  doi = {https://doi.org/10.1149/1.2907433},
  language = {en},
}