@conference{813611,
  author = {G Mulholland and Thomas Germer and J Stover},
  title = {Modeling, Measurement, and Standards for Wafer Inspection, Government Microcircuits Applications and Critical Technologies},
  year = {2003},
  month = {2003-01-01 00:01:00},
  publisher = {Countering Asymmetric Threats (GOMAC Tech) Conf., Tampa, FL, USA},
  language = {en},
}