@conference{813871,
  author = {Li Sung and George Mulholland and Thomas Germer},
  title = {Polarization of Light Scattered by Particles on Silicon Wafers},
  year = {1999},
  number = {3619},
  month = {1999-01-01 00:01:00},
  publisher = {Proceedings SPIE, Vol. 3619, entitled Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays, Undefined},
  language = {en},
}