@article{814031,
  author = {M Misakian and Eric Benck and Ying-Ju Wang},
  title = {Time evolution of ion energy distributions and optical emission in pulsed inductively coupled radio frequency plasmas},
  year = {2000},
  number = {88},
  month = {2000-01-01 00:01:00},
  publisher = {Journal of Applied Physics},
  language = {en},
}