@conference{814751,
  author = {Jae Kim and S Ehrman and George Mulholland and Thomas Germer},
  title = {Polarized Light Scattering From Metallic Particles on Silicon Wafers},
  year = {2001},
  month = {2001-12-01 00:12:00},
  publisher = {Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries, Conference | 2nd | Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II | SPIE, Undefined},
  language = {en},
}