@article{815051, author = {E Potma and X. Xie and L Muntean and Jan Preusser and D Jones and Jun Ye and S Leone and E Hinsberg and W Schade}, title = {Chemical imaging of photoresists with coherent anti-Stokes Raman scattering (CARS) microscopy}, year = {2004}, number = {108}, month = {2004-01-01 00:01:00}, publisher = {Journal of Physical Chemistry B}, language = {en}, }