@conference{823241,
  author = {Christopher Soles and V. Lee and R Hedden and D Liu and Barry Bauer and Wen-Li Wu},
  title = {X-Ray Reflectivity Porosimetry for the Characterization of Porous Low-K Dielectric Constant Thin Films},
  year = {2004},
  number = {25(1)},
  month = {2004-04-01 00:04:00},
  publisher = {Polymers for Microelectronics and Nanolectronics | |, Undefined},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852163},
  language = {en},
}