@conference{823786,
  author = {K Kreider and David Allen and D Chen and D DeWitt and C Meyer and Benjamin Tsai},
  title = {Effects of Wafer Emissivity on Lightpipe Radiometry in RTP Tools},
  year = {2001},
  month = {2001-01-01 00:01:00},
  publisher = { 9th Intl. Conf. Advanced Thermal Processing of Semiconductors , , 1, SC},
  language = {en},
}