@article{824496,
  author = {F Campos and G Weaver and C Waltman and S Leone},
  title = {Activation of the Si(100)/Cl<sub>2</sub> etching reaction at high Cl<sub>2</sub> translational energies, Mat.},
  year = {1992},
  number = {236},
  month = {1992-01-01 00:01:00},
  publisher = {Res Soc Symp Proc},
  language = {en},
}