@conference{824841,
  author = {R Allen and Heather Patrick and M Bishop and Thomas Germer},
  title = {Study of Test Structures for Use as Reference Material in Optical Critical Dimension Applications},
  year = {2007},
  month = {2007-01-01 00:01:00},
  publisher = {2007 IEEE International Conference on Microelectronic Test Structures , Tokyo, 1, JA},
  language = {en},
}