@article{825536,
  author = {C Mach and D DeWitt and Benjamin Tsai and G Yetter},
  title = {Modeling of Solvent Evaporation Effects for Hot Plate Baking of Photoresist},
  year = {1994},
  number = {2195},
  month = {1994-01-01 00:01:00},
  publisher = {SPIE},
  language = {en},
}