@article{826321,
  author = {Y Zhao and M Mao and R Horowitz and J Varesi and P Norton and John Kitching},
  title = {Optomechanical Uncooled Infrared Imaging System: Design, Microfabrication and Performance,},
  year = {2002},
  number = {11},
  month = {2002-01-01 00:01:00},
  publisher = {Journal of Microelectromechanical Systems},
  language = {en},
}