@article{831121,
  author = {Dipak Paramanik and Abhishek Motayed and Geetha Aluri and Sergiy Krylyuk and Albert Davydov},
  title = {Formation of large-area GaN nanostructures with controlled geometry and morphology using top-down fabrication scheme.},
  year = {2012},
  number = {30},
  month = {2012-06-26 00:06:00},
  publisher = {Journal of Vacuum Science and Technology B},
  language = {en},
}