@article{834376,
  author = {B Dragnea and J Preusser and J Szarko and L McDonough and S Leone and W Hinsberg},
  title = {Chemical Mapping of Patterned Polymer Photoresists by Near-Field Infrared Microscopy},
  year = {2001},
  number = {175},
  month = {2001-05-01 00:05:00},
  publisher = {Applied Surface Science},
  language = {en},
}