@article{836501, author = {M Mastro and O Kryliouk and M Reed and T Anderson and Albert Davydov and Alexander Shapiro}, title = {Thermal Stability of MOCVD and HVPE GaN Layers in H2, HCl, NH3 and N2}, year = {2001}, number = {188}, month = {2001-11-01 00:11:00}, publisher = {Physica Status Solidi A-Applications and Materials Science}, language = {en}, }