@conference{837516,
  author = {H Lee and Eric Lin and Haonan Wang and Wen-Li Wu and W Chen and T Deis},
  title = {Characterization of Porous Low-k Dielectric Thin Films Using X-ray Reflectivity and Small-angle Neutron Scattering and Ion Scattering},
  year = {2001},
  number = {87(18)},
  month = {2001-06-01 00:06:00},
  publisher = {International Interconnect Technology Conference | | | IEEE, Undefined},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851871},
  language = {en},
}