@conference{837896,
  author = {Christopher White and Wen-Li Wu},
  title = {A Novel Method to Determine the Mechanical Properties of Ultra-Thin Films},
  year = {1998},
  number = {511},
  month = {1998-04-01 00:04:00},
  publisher = {Low-Dielectric Constant Materials IV, Undefined},
  language = {en},
}