@conference{838156,
  author = {C Devadoss and Yijun Wang and R Puligadda and Joseph~undefined~undefined~undefined~undefined~undefined Lenhart and E Jablonski and Daniel Fischer and S Sambasivan and Eric Lin and Wen-Li Wu},
  title = {Investigation of BARC-Resist Interfacial Interactions},
  year = {2003},
  number = {5040},
  month = {2003-06-01 00:06:00},
  publisher = {Optical Microlithography, Conference |16th | Optical Microlithography XVI | SPIE, Santa Clara, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852158},
  language = {en},
}