@conference{838961,
  author = {D Goldfarb and Q Lin and M Angelopoulos and Christopher Soles and Eric Lin and Wen-Li Wu},
  title = {Characterization of Thin and Ultrathin Polymer and Resist Films},
  year = {2001},
  number = {4345},
  month = {2001-08-01 00:08:00},
  publisher = {Advances in Resist Technology and Processing, Conference | 18th | Advances in Resist Technology and Processing XVIII  | SPIE, Undefined},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851906},
  language = {en},
}