@conference{841316,
  author = {N. Sullivan and M Mastovich and Ronald Dixson and P Knutruda and B Bunday and P Febrea and R Brandoma},
  title = {Characterizing CDSEM Metrology of 193 nm Resists at Ultra Low Voltage},
  year = {2002},
  month = {2002-01-01 00:01:00},
  publisher = {ARCH Interface Conference, San Diego, CA, USA},
  language = {en},
}