@conference{842801,
  author = {Michael Cresswell and Richard Allen and Rathindra Ghoshtagore and Nadine Guillaume and Patrick Shea and Sarah Everist and Loren Linholm},
  title = {Characterization of Electrical Linewidth Test Structures Patterned in (100) Silicon-on-Insulator for Use as CD Standards},
  year = {2000},
  month = {2000-04-06 00:04:00},
  publisher = {ICMTS Proceedings, Santa Clara, CA, USA},
  language = {en},
}